Cabot Microelectronics Corp to acquire VC-backed NexPlanar Corp

Cabot Microelectronics Corp has agreed to buy NexPlanar Corp for about $142 million. The deal is expected to close within 30 to 45 days. Based in Hillsboro, Oregon, NexPlanar is a maker of advanced CMP pad solutions for the semiconductor sector. NextPlanar's backers included BlueRun Ventures, Intel Capital, SmartForest Ventures, Finaventures and Interwest Partners.

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